SEQUOIA Newsletters
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SEQUOIA News Vol 8, No. 1, Q4 2009.
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SEQUOIA News Vol 6, No. 1, Q2 2007.
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SEQUOIA News Vol 4, No. 1, Q1 2005.
- SEQUOIA News Vol 3, No. 2, Q2 2004.
- SEQUOIA News Vol 3, No. 1, Q1 2004.
- SEQUOIA News Vol 2, No. 2, Q4 2003.
- SEQUOIA News Vol 2, No. 1, Q3 2003.
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SEQUOIA News Vol 1, No. 2, Q2 2002.
- Inaugural issue SEQUOIA News Vol 1, No. 1, Q1 2002.
Recent Papers:
- Michael C. Smayling, Valery Axelrad, "32nm and below Logic Patterning using Optimized Illumination and Double
Patterning", SPIE Microlithography, Feb. 2009
- Koichiro Tsujita, Koji Mikami, Hiroyuki Ishii, Ryo Nakayama,
Mikio Arakawa, Takehiro Ueno, Shogo Fujie,
and Kazuhiro Takahashi , "Innovative pattern matching method
considering process margin and scanner design information", SPIE Microlithography, Feb. 2009
Application Notes: